Abstract
With the rapid development of intelligent networking technology, fan filter units (FFUs) in cleanrooms can be networked as a cluster to form multiple low-pollution minienvironments. Therefore, FFU cluster management for different process cleanliness requirements and energy savings targets is a critical topic. This study uses particle swarm optimization with a metaheuristics algorithm to collect, calculate, and dynamically adjust air recirculation at a production site and plan FFU clusters for a cleanroom by integrating the FFU number, airflow speed, size, and other characteristics to ensure the quality of production and achieve energy savings targets.
Recommended Citation
Liu, Fu-Han and Lin, Wootsong, "A Model on Energy Power Management of Air-Recirculation in a Clean Room" (2021). ICEB 2021 Proceedings (Nanjing, China). 9.
https://aisel.aisnet.org/iceb2021/9