Abstract

With the rapid development of intelligent networking technology, fan filter units (FFUs) in cleanrooms can be networked as a cluster to form multiple low-pollution minienvironments. Therefore, FFU cluster management for different process cleanliness requirements and energy savings targets is a critical topic. This study uses particle swarm optimization with a metaheuristics algorithm to collect, calculate, and dynamically adjust air recirculation at a production site and plan FFU clusters for a cleanroom by integrating the FFU number, airflow speed, size, and other characteristics to ensure the quality of production and achieve energy savings targets.

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